Advances in surface electrical characterization at the nanoscale by using
Scanning Kelvin probe microscopy (SKPM)
Atomic Force Microscopy (AFM) Seminar and Live Demo
12th June 2019
Faculty of Civil and Industrial Engineering - Sapienza University of Rome
Figure capture: 10x10 µm2 image of a polymer-patterned array. Topography image (left), FM-SKPM image (center), and AM-SKPM image (right).
09:00 Welcome and Introduction
09:10 Talk: “Advances in surface electrical characterization at the nanoscale by using Scanning Kelvin probe microscopy (SKPM)“
09:30 Instrument Demonstration on Park NX10 AFM
10:30 Discussion und Summary
14:00 Welcome and Introduction
14:10 Talk: “Advances in surface electrical characterization at the nanoscale by using Scanning Kelvin probe microscopy (SKPM)“
14:30 Instrument Demonstration on Park NX10 AFM
15:30 Discussion und Summary
Scanning Kelvin Probe microscopy (SKPM) allows measuring work function and electrical potential distribution of various materials, to provide a better understanding of nanostructures and CMOS semiconductor devices to improve their performance. SKPM has also been used to determine quantitative information such as the charge distribution in polymer materials. Compared to other techniques, SKPM is nondestructive and compatible to ambient conditions. Conventional Amplitude Modulation (AM) SKPM has already allowed remarkable enhancements in the field of device reliability, but it is limited by its signal-to-noise detection ability. For this scope Park Systems recently developed Frequency Modulation FM-SKPM. The results show that FM-SKPM is significantly more sensitive than AM-SKPM in measuring surface potential distribution.
In this workshop we will demonstrate that FM-SKPM has better sensitivity in detecting surface potential variation of polymer material in comparison to AM-SKPM. In fact, FM-SKPM provided higher resolution with sharper edges of the domains and detected smaller potential variations than AM-SKPM on the same irregular surface.
Dr. Andrea Cerreta – Application Scientist at Park Systems
Park NX10 AFM